Motional Impedance Analysis: Bridging the ‘Gap’ in Dielectric Transduction
نویسندگان
چکیده
This paper presents an analytical model to estimate the motional resistance for partial air gap capacitivelytransduced MEMS resonators. This model serves as a link between the well formulated analytical models for conventional air gap and internal dielectric transduction schemes, thereby helping decide which scheme is optimal for a given design frequency. Using this model, we simulate and experimentally verify the motional resistance for a 303MHz polysilicon disk resonator within a 5% range of accuracy.
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